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Product Overview
Dexin high-performance RF generators feature a high-performance amplifier circuit, high-precision VI detection, and fully digital high-speed power control. It provides real-time display of output power, reflected power, and load impedance, with its control circuit enabling rapid dynamic power adjustment to maintain stable output even under load variations. The system supports continuous and pulse output with phase synchronization capabilities, along with rapid arc detection and suppression, effectively protecting both the load and the power supply itself. It finds wide applications in semiconductors, photovoltaics, display panels, plasma technology research, and other related fields.
Product Features
* Support advanced high-efficiency and high stability RF power amplifier technology
* Support high stability and reliability with full digital process
* Large output power margin, capable of long-term stable operation
* Precise measurement for output power, reflected power and load impedance
* Support automatic gain control (AGC), output power accurate control
* Supports local control, IO control and remote control with RS485 and EtherCat
* Support continuously adjust output power from the minimum to the maximum rate with advanced power amplifier technology
* Support arc protection, quick detection and intelligent extinction
* Support overload, overcurrent and overheat protection
Tech Parameters
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Items |
Tech Parameters |
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|
DX-RFS-13006 DX-RFS-27006 |
DX-RFS-13010 DX-RFS-27010 |
DX-RFS-13015 DX-RFS-27015 |
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Mains |
AC 220V±10% 50Hz / 60Hz |
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Output Freq |
13.56MHz / 27.12MHz as per order |
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Frequency stability |
±0.005 % |
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Rated power |
600W |
1kW |
1.5kW |
|
Output power range |
10W- 600W |
15 W- 1kW |
20W- 1.5kW |
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Max reflected power |
120 W |
200 W |
300 W |
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RF output connector |
N- type Female or as ordered |
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IO connector |
Analog (DB-25 Female) |
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Communication |
RS485 (DB-9 Female), EtherCat |
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Tuning Time |
< 5ms |
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Power Stability |
1% of set point or 0.1% of full rated power, whichever is greater |
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Output Mode |
CW/ Pulsing ( as per order) |
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Pulsing frequency |
50Hz - 30kHz |
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Duty cycle |
1% - 99 %（Minimum ON/ OFF time: 12us） |
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Harmonic |
<-50 dBc |
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Stray |
<-50 dBc |
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Efficiency |
≥70%（Z= 50Ω, Rated output） |
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Control |
LCD+ Knob |
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Phase sync (CEX) |
Support, Optional as order |
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Protection |
Protection for over voltage, over current, over temperature, reflected power exceeding limit, external lock, and arc detection Protection for reflection power over limit, fail of external interlock and arc |
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Cooling medium |
Air |
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Ambient Temp. |
+ 5℃ - + 40℃ |
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Operating humidity |
5% - 70% |
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Dimensions (D* W* H mm) |
450 * 483 * 88 |
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Order Guide
|
Model NO. |
Frequency |
Power |
|
DX-RFS-13006 |
13.56 MHz |
600W |
|
DX-RFS-13010 |
1 kW |
|
|
DX-RFS-13015 |
1.5 kW |
|
|
DX-RFS-27006 |
27.12MHz |
600W |
|
DX-RFS-27010 |
1 kW |
|
|
DX-RFS-27015 |
1.5 kW |
