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Product Overview
The DX-RFM-13/27/40XXX series combo unit integrates RF Generator and Match Box into one case with a compact structure, small size, and easy installation. With a stable and reliable signal source and power amplifier control module, the incident and reflected power can be accurately measured, and the output power can be precisely controlled. It is widely used in applications such as vacuum plasma generators and thin film deposition.
Product Features
* Support advanced high-efficiency and high stability RF power amplifier technology
* Support high stability and reliability with full digital process
* Large output power margin, capable of long-term stable operation
* Precise measurement for output power, reflected power and load impedance
* Support automatic gain control (AGC), output power accurate control
* Supports local control, IO control and remote control with RS485 and EtherCat
* Support continuously adjust output power from the minimum to the maximum rate with advanced power amplifier technology
* Support arc protection, quick detection and intelligent extinction
* Support overload, overcurrent and overheat protection
Tech Parameters
|
Item |
Tech Parameters |
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DX-RFM-13003/DX-RFM-27003/DX-RFM-40003 |
DX-RFM-13006/DX-RFM-27006/DX-RFM-40006 |
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Mains |
AC 220V±10%, 50Hz/60Hz |
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RF Output |
Output Freq |
13.56MHz/27.12MHz/40.68MHz for option |
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Output Power Range |
5W-300W |
10W-600W |
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Rated Power |
300W |
600W |
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Max Reflected Power |
60 W |
120 W |
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Efficiency |
≥60 % (Z= 50 Ω, Rated Output) |
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Harmonic |
＜-50dBc |
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Stray |
＜-50dBc |
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Power Stability |
1% of set point or 0.1% of full rated power, whichever is greater |
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RF output port |
7/16 DIN connector (F) |
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Protection |
DC source over voltage |
-- |
Auto shutdown when DC voltage exceed limit |
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DC source over current |
-- |
Auto shutdown when DC current exceed limit |
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DC source over heating |
-- |
Auto shutdown when DC temperature exceed limit |
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Amplifier overheating |
Auto shutdown when Amplifier overheating |
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Reflected power exceeds limit |
Limit output power when the reflected power exceeds the set threshold |
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External Lock |
auto shut down when external lock fails |
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Arc Protection |
auto shut down when arc detected |
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Cooling medium |
Air |
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Dimension |
DxWxH (mm) |
435*483*132 |
500*483*132 |
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Matching performance |
Reflected power |
＜1% |
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Matching method |
manual/ automatic |
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Matching time |
＜2s |
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Order Guide (Combo model)
|
Model NO. |
Frequency |
Power |
|
DX-RFM-13003 |
13.56 MHz |
300W |
|
DX-RFM-13006 |
600W |
|
|
DX-RFM-27003 |
27.12MHz |
300W |
|
DX-RFM-27006 |
600W |
|
|
DX-RFM-40003 |
40.68MHz |
300W |
|
DX-RFM-40006 |
600W |
