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Match Box (Standard model)
Product Overview
The ADP13/27XXX series Match Box is used between RF Generator and various plasma loads to automatically adjust the load impedance to match the output impedance of the RF Generator, maximizing power transmission and reducing signal reflection. It adopts high-precision VI measurement technology, high-speed FPGA processing chip, high-precision impedance adjustment and tracking control algorithm, which can achieve fast measurement and automatic matching adjustment of load impedance. This device has the advantages of high matching accuracy, wide matching range, and fast matching speed, and is widely used in various RF power systems.
Product Features
l Full digital control, high matching accuracy, short matching time
l Compact structure, easy installation
l Support manual/automatic matching
l Support maintain and preset config
l Support communication function and independent connecting to the host computer to display real-time load status
l Support high reliability and extended service life with vacuum capacitors
l Wide matching range, customizable to fit any load
Tech Parameters
|
Items |
Tech Parameters |
||
|
ADP13015 ADP27015 |
ADP13030 ADP27030 |
ADP13060 ADP27060 |
|
|
Frequency |
13.56MHz/ 27.12MHz as per order |
||
|
Rated power |
1.5kW |
3kW |
6kW |
|
RF input connector |
N type (Female) |
7/16 DIN (Female) |
|
|
RF output connector |
Copper Busbar or 7/16 DIN (Female) |
Copper Busbar or customized |
|
|
Max Voltage |
3000Vpeak |
4500Vpeak |
6000Vpeak |
|
Max Currency |
15Arms (7/16 DIN); 30Arms (Copper Busbar) |
45Arms |
60Arms |
|
Max reflected power |
≤3W or 1% of the input power |
||
|
Tuning time |
≤2s, preset time≤0.5s |
||
|
Target Impedance |
50Ω |
||
|
Dimensions (D*W*H mm) |
400 * 260 * 132 |
400 * 350 * 155 |
450 * 400 * 177 |
|
Cooling medium
|
Air |
Air+ Water (Min≥2L/min) |
Air+ Water (Min≥4L/min) |
|
Remote connector |
RS485 / Ethernet RJ45 |
||
|
Mains |
AC 220V ±10% , 50Hz /60Hz |
||
|
Operating Temp. |
+5 ℃ - +40 ℃ |
||
Match Box (Pro model)
Product Overview
The ADP13/27XXXP series professional Match Box is specially designed for situations requiring high precision, such as semiconductor etching, thin film deposition, photovoltaic LED and etc. With high-precision VI measurement technology and high-speed FPGA for impedance calculation, it can achieve fast matching and high matching accuracy. During operation, the system continuously monitors load impedance changes and makes real-time adjustments, maintaining reflected power below 1‰ of the input power.
Product Features
l Advanced matching algorithm that can directly reach the matching point, short matching time
l High matching accuracy and low reflected power (＜1‰) with advanced VI detection technology
l Support VI detection (6kW and above models) for output, real-time detect voltage, current, and load impedance of the output
l Support pulse mode, rapid and accurate matching available even under pulse signals
l Optimized matching algorithm for the fast and cyclical fluctuating loads (such as rotating high-power coating devices), minimize reflected power to the greatest extent possible
l Optimize the matching algorithm for rapidly cyclic fluctuating loads (e.g., rotating coating devices with high-power) to minimize reflected power
l Support real-time monitoring of after-match impedance, input&reflected power variation curves with professional monitoring software (Smith Chart)
Tech Parameters
|
Items |
Tech Parameters |
||||
|
ADP13015P ADP27015P |
ADP13030P ADP27030P |
ADP13060P ADP27060P |
ADP13120P ADP27120P |
ADP13200P ADP27200P |
|
|
Frequency |
13.56 MHz/ 27.12 MHz as per order |
||||
|
Rated power |
1.5 kW |
3 kW |
6 kW |
12 kW |
20 kW |
|
RF input connector |
N type (Female) |
7/16 DIN (Female) |
7/8” EIA Flange |
1-5/8” EIA Flange |
|
|
RF output connector |
Copper Busbar or 7/16 DIN (Female)Type or customized |
Copper Busbar or customized |
|||
|
Max Voltage |
3000Vpeak |
4500Vpeak |
6000Vpeak |
9000Vpeak |
9000Vpeak |
|
Max Currency |
15Arms (7/16 DIN) 30Arms (Copper Busbar) |
45Arms |
60Arms |
90Arms |
120Arms |
|
Output VI Detection |
N/A |
Output voltage, currency, and load impedance |
|||
|
Max reflected power |
≤1W, or 1 1‰ of the input power |
||||
|
Tuning time |
≤2s, preset time≤0.5 s |
||||
|
Pulse mode |
100Hz -30kHz, Duty cycle 1% - 99 % (Minimum ON/ OFF time: 12us) |
||||
|
Target Impedance |
50Ω |
||||
|
Dimensions (D* W* H mm) |
400 * 260 * 132 |
450 * 270 * 180 |
420 * 300 * 178 |
540 * 380 * 222 |
540 * 460 * 244 |
|
Cooling medium |
Air |
Air+Water (Min≥2L/min) |
Air+Water (Min≥4L/min) |
Air+Water (Min≥8L/min) |
Air+Water (Min≥12L/min) |
|
Remote connector |
RS485 / Ethernet RJ45 |
||||
|
Mains |
AC 220V±10%, 50Hz/60Hz |
||||
|
Operating Temp. |
+5 ℃ - +40 ℃ |
||||
Match Box (ICP model)
Product Overview
The ADP13/27XXXP-I series professional Match Box is specially designed for ICP loads with its compact size. With high-precision VI measurement technology and high-speed FPGA for impedance calculation and matching adjustment control, it achieves extremely fast matching and high matching accuracy. During operation, the system continuously monitors load impedance changes and makes real-time adjustments, maintaining reflected power below 1‰ of the input power.
Product Features
l Small size, easy installation, suitable for ICP load
l Advanced matching algorithm that can directly reach the matching point, short matching time
l High matching accuracy and low reflected power (＜1‰) with advanced VI detection technology
l Support VI detection (6kW and above models) for output, real-time detect voltage, current, and load impedance of the output
l Support pulse mode, rapid and accurate matching available even under pulse signals
l Optimized matching algorithm for the fast and cyclical fluctuating loads (such as rotating high-power coating devices), minimize reflected power to the greatest extent possible
l Optimize the matching algorithm for rapidly cyclic fluctuating loads (e.g., rotating coating devices with high-power) to minimize reflected power
l Support real-time monitoring of after-match impedance, input&reflected power variation curves with professional monitoring software (Smith Chart)
Tech Parameters
|
Items |
Tech Parameters |
|||
|
ADP13030P-I ADP27030P-I |
ADP13060P-I ADP27060P-I |
ADP13120P-I ADP27120P-I |
ADP13200P-I ADP27200P-I |
|
|
Frequency |
13.56MHz/27.12MHz as per order |
|||
|
Rated power |
3kW |
6kW |
12kW |
20kW |
|
RF input connector |
7/16 DIN (Female) |
7/16 DIN (Female) |
7/8” EIA Flange |
1-5/8” EIA Flange |
|
RF output connector |
Copper Busbar or customized |
|||
|
Max Voltage |
3000Vpeak |
6000Vpeak |
9000Vpeak |
9000Vpeak |
|
Max Currency |
30Arms |
60Arms |
90Arms |
120Arms |
|
Output VI Detection |
Output voltage, currency, and load impedance |
|||
|
Max reflected power |
≤1W, or 1 1‰ of the input power |
|||
|
Tuning time |
≤2s, preset time≤0.5s |
|||
|
Pulse mode |
100Hz -30kHz, Duty cycle 1% - 99 % (Minimum ON/ OFF time: 12us) |
|||
|
Target Impedance |
50Ω |
|||
|
Dimensions (D* W* Hmm) |
333 * 240 * 140 |
370 * 260 * 162 |
380 * 330 * 180 |
460 * 420 * 224 |
|
Cooling medium |
Air |
Air+Water (Min≥8L/min) |
||
|
Remote connector |
RS 485 / Ethernet RJ 45 |
|||
|
Mains |
AC 220V±10%, 50Hz/60Hz |
|||
|
Operating Temp. |
+5 ℃ - +40 ℃ |
|||
Order Guide
|
Model NO. |
Power |
Workable with CCP and ICP load |
Workable with ICP load only |
Support Pulse |
Reflected Power <1‰ |
Load Impedance Detection |
|
ADP13015/ADP27015 |
1.5kW |
● |
|
|
|
|
|
ADP13030/ADP27030 |
3kW |
● |
|
|
|
|
|
ADP13060/ADP27060 |
6kW |
● |
|
|
|
|
|
ADP13015P/ADP27015P |
1.5kW |
● |
|
● |
● |
|
|
ADP13030P/ADP27030P |
3kW |
● |
|
● |
● |
|
|
ADP13060P/ADP27060P |
6kW |
● |
|
● |
● |
● |
|
ADP13120P/ADP27120P |
12kW |
● |
|
● |
● |
● |
|
ADP131200P/ADP27200P |
20kW |
● |
|
● |
● |
● |
|
ADP13030P-I/ ADP27030P-I |
3kW |
|
● |
● |
● |
● |
|
ADP13060P-I/ ADP27060P-I |
6kW |
|
● |
● |
● |
● |
|
ADP13120P-I/ ADP27120P-I |
12kW |
|
● |
● |
● |
● |
|
ADP131200P-I/ ADP27200P-I |
20kW |
|
● |
● |
● |
● |
