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Matching Box (Standard model)
Product Overview
The ADP13/27XXX series matching box is used between RF power generator and various plasma loads to automatically adjust the load impedance to match the output impedance of the RF power generator, maximizing power transmission and reducing signal reflection. It adopts high-precision VI measurement technology, high-speed FPGA processing chip, high-precision impedance adjustment and tracking control algorithm, which can achieve fast measurement and automatic matching adjustment of load impedance. This device has the advantages of high matching accuracy, wide matching range, and fast matching speed, and is widely used in various RF power systems.
Product Features
- Full digital control, high matching accuracy
- Compact structure, easy installation
- Support manual/automatic matching
- Support maintain and preset config
- Support communication function and can independently connect to the upper computer to display real-time load status
- Support high reliability and long service life with vacuum capacitors
- Wide matching range, customizable to fit any load
Tech Parameters
|
Items |
Tech Parameters |
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Frequency |
13 . 56 MHz/ 27 . 12 MHz as per order |
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Rated power |
1 . 5 k W |
3 k W |
6 k W |
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RF input connector |
N type |
L-29 Type |
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RF output connector |
Copper Busbar/ L29 Type/customized |
L-29 Type/customized |
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Max Voltage |
3000Vpeak |
4500Vpeak |
6000Vpeak |
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Max Currency |
15Arms(L29) 30Arms (Copper Busbar) |
45Arms |
60Arms |
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|
Max reflected power |
≤3 W or 1 % of the input power |
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Tuning time |
≤2 s, preset time≤0.5 s |
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Target Impedance |
50Ω |
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Dimensions (D* W* Hmm) |
400 * 260 * 132 |
400 * 350 * 155 |
450 * 400 * 177 |
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Cooling medium |
Air |
Air+ Water (Min≥2 L/ min) |
Air+ Water (Min≥4 L/ min) |
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Remote connector |
RS 485 / Ethernet RJ 45 |
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Water pipe connector |
Water pipes with an outer diameter of 10mm and an inner diameter of 8mm |
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Mains |
Single phase, 220V ±10% , AC 50 / 60 Hz |
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Operating Temp. |
+ 5 ℃ - + 40 ℃ |
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Matching Box (Pro model)
Product Overview
The ADP13/27XXXP series professional matching box is specially designed for situations requiring high precision, such as semiconductor etching, thin film deposition, photovoltaic LED and etc. With high-precision VI measurement technology, high-speed FPGA, it can achive fast matching and high matching accuracy. In the matching state, the load impedance changes can be tracked and adjusted in real time, and the reflected power can be kept less than 1 ‰ of the input power.
Product Features
- Adopt advanced matching algorithm that can directly reach the matching point, short matching time
- Support high-accurent matching and low reflected power (＜1‰) with advanced VI detection technology
- Support VI detection (6kW and above models) for output, real-time detect voltage, current, and load impedance of the output
- Supports pulse working mode, and can still match quickly and correctly under pulse signals
- Optimized matching algorithm for the fast and cyclical fluctuating loads (such as rotating high-power coating devices), minimize reflected power to the greatest extent possible
- Support real-time monitor impedance (Smith chart), input power, and reflected power with professional monitoring software
Tech Parameters
|
Items |
Tech Parameters |
||||
|
Frequency |
13 . 56 MHz/ 27 . 12 MHz as per order |
||||
|
Rated power |
1.5 kW |
3 kW |
6 kW |
12 kW |
20 kW |
|
RF input connector |
N type |
L-29 Type |
7/8” EIA Flange |
1-5/8” EIA Flange |
|
|
RF output connector |
Copper Busbar/ L 29 Type/customized |
Copper Busbar /customized |
|||
|
Max Voltage |
3000Vpeak |
4500Vpeak |
6000Vpeak |
9000Vpeak |
9000Vpeak |
|
Max Currency |
15Arms (L29) 30Arms (Copper Busbar) |
45Arms |
60Arms |
90Arms |
120Arms |
|
Output VI Detection |
N/A |
Output voltage, currency, and load impedance |
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|
Max reflected power |
≤1W, or 1 1‰ of the input power |
||||
|
Tuning time |
≤2 s, preset time≤0.5 s |
||||
|
Pulse mode |
100Hz -30kHz, Duty cycle 1 - 99 % (Minimum ON/ OFF time is 12 us) |
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|
Target Impedance |
50Ω |
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|
Dimensions (D* W* Hmm) |
400 * 260 * 132 |
400 * 350 * 155 |
420 * 300 * 178 |
540 * 380 * 222 |
540 * 460 * 244 |
|
Cooling medium |
Air |
Air+ Water (Min≥2 L/ min) |
Air+ Water (Min≥4 L/ min) |
Air+ Water (Min≥8 L/ min) |
Air+ Water (Min≥12 L/ min) |
|
Remote connector |
RS 485 / Ethernet RJ 45 |
||||
|
Water pipe connector |
Water pipes with an outer diameter of 10mm and an inner diameter of 8mm |
||||
|
Mains |
Single phase, 220V ±10% , AC 50 / 60 Hz |
||||
|
Operating Temp. |
+ 5 ℃ - + 40 ℃ |
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Matching Box (ICP model)
Product Overview
The ADP13/27XXXP-I series professional matching box is specially designed for ICP loads with its small size. With high-precision VI measurement technology and high-speed FPGA for impedance calculation and matching adjustment control, it can achive extremely fast matching and high matching accuracy. In the matching state, the load impedance changes can be tracked and adjusted in real time, and the reflected power can be kept less than 1 ‰ of the input power.
Product Features
- Small size, easy installation, suitable for ICP load
- Adopt advanced matching algorithm that can directly reach the matching point, short matching time
- Support high-accurent matching and low reflected power (＜1‰) with advanced VI detection technology
- Support VI detection for output, real-time detect voltage, current, and load impedance of the output
- Supports pulse working mode, and can still match quickly and correctly under pulse signals
- Optimized matching algorithm for the fast and cyclical fluctuating loads (such as rotating high-power coating devices), minimize reflected power to the greatest extent possible
- Support real-time monitor impedance (Smith chart), input power, and reflected power with professional monitoring software
Tech Parameters
|
Items |
Tech Parameters |
|||
|
Frequency |
13.56 MHz / 27.12 MHz as per order |
|||
|
Rated power |
3 k W |
6 k W |
12 k W |
20 k W |
|
RF input connector |
L-29 Type |
L-29 Type |
7/8” EIA Flange |
1-5/8” EIA Flange |
|
RF output connector |
Copper Busbar/customized |
|||
|
Max Voltage |
3000Vpeak |
6000Vpeak |
9000Vpeak |
9000Vpeak |
|
Max Currency |
30Arms |
60Arms |
90Arms |
120Arms |
|
Output VI Detection |
Output voltage, currency, and load impedance |
|||
|
Max reflected power |
≤1W, or 1 1‰ of the input power |
|||
|
Tuning time |
≤2 s, preset time≤0.5 s |
|||
|
Pulse mode |
100Hz -30kHz, Duty cycle 1 - 99 % (Minimum ON/ OFF time is 12 us) |
|||
|
Target Impedance |
50Ω |
|||
|
Dimensions (D* W* Hmm) |
333 * 240 * 140 |
370 * 260 * 162 |
380 * 330 * 180 |
460 * 420 * 224 |
|
Cooling medium |
Air |
Air+ Water (Min≥8 L/ min) |
||
|
Remote connector |
RS 485 / Ethernet RJ 45 |
|||
|
Mains |
Single phase, 220V ±10% , AC 50 / 60 Hz |
|||
|
Operating Temp. |
+ 5 ℃ - + 40 ℃ |
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Order Guide
|
Model NO. |
Power |
Workable with CCP and ICP load |
Workable with ICP load |
Support Pulse |
Reflected Power <1‰ |
Output VI Detection |
|
ADP13015/ADP27015 |
1.5kW |
● |
|
|
|
|
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ADP13030/ADP27030 |
3kW |
● |
|
|
|
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ADP13060/ADP27060 |
6kW |
● |
|
|
|
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ADP13015P/ADP27015P |
1.5kW |
● |
|
● |
● |
|
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ADP13030P/ADP27030P |
3kW |
● |
|
● |
● |
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ADP13060P/ADP27060P |
6kW |
● |
|
● |
● |
● |
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ADP13120P/ADP27120P |
12kW |
● |
|
● |
● |
● |
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ADP131200P/ADP27200P |
20kW |
● |
|
● |
● |
● |
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ADP13060P-I/ADP27060P-I |
6kW |
|
● |
● |
● |
● |
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ADP13120P-I /ADP27120P-I |
12kW |
|
● |
● |
● |
● |
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ADP131200P-I /ADP27200P-I |
20kW |
|
● |
● |
● |
● |
