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RF Power Generator (3kW-20kW Series)
Product Overview
These RF Power Generator adopt all solid state RF amplifier technology and are indispensable equipment for semiconductor manufacturing, LED, solar photovoltaic industries, plasma generation in scientific experiments, RF induction heating, medical beauty, atmospheric plasma disinfection and cleaning industries. Its main applications include RF sputtering, reactive ion etching, RF bias, polymorphic plasma, plasma surface treatment, inductive coupling, and RF laser plasma systems.
Product Features
- Support advanced high-efficiency and high stability RF power amplifier technology
- Support high stability and reliability with full digital process
- Large output power margin, capable of long-term stable operation
- Precise measurement for output power, reflected power and load impedance
- Support automatic gain control (AGC), output power accurate control
- Supports local control, IO control and remote control with RS485 and RJ45 ports
- Support continuously adjust output power from the minimum to the maximum rate with advanced power amplifier technology
- Support arc and standing wave protection, quick respond to protect equipment safety in case of abnormalities
- Support overload, overcurrent and overheat protection
Tech Parameters
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Items |
Tech Parameters |
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Mains |
3 Phase 380 V 50 / 60 Hz, Rectangular heavy-duty connector |
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Output Freq |
13.56 MHz/ 27.12 MHz as per order |
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Power stablility |
±0.005 % |
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Rated power |
3 k W |
6 k W |
12 k W |
20 k W |
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Output power range |
50 W- 3 k W |
50 W- 6 k W |
50 W-12 k W |
50 W- 20 k W |
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Max reflected power |
600 W |
1200 W |
2400 W |
4000 W |
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RF output connector |
L 29 type |
7/8” Flange |
1-5/8” Flange |
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Connectors |
RS485, RJ45, DB9-Female (for connecting matching box) |
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Tuning Time |
< 10 ms |
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Power Stability |
1.0% of set point or 0.1% of full rated power, whichever is greater |
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Output Mode |
CW/ Pulsing ( as per order) |
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Pulsing frequency |
100 Hz- 30 kHz |
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Duty cycle |
1 - 99 %（Minimum ON/ OFF time is 12 us） |
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Harmonic |
<- 50 d Bc |
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Spurious |
<- 50 d Bc |
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Effiency |
≥70 %（Z= 50 Ω, Rated output） |
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Control |
LCD+ Knob |
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Phase sync (CEX) |
Support, Optional as order |
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Protection |
Protection for over voltage, over current, over temperature, reflected power exceeding limit, external lock, and arc detection Protection for reflection power over limit, fail of external interlock and arc |
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Power switch on real panel |
Hydraulic air switch |
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Cooling medium |
Water (Min≥4 L/min) |
Water (Min≥6 L/min) |
Air+ Water (Min≥12 L/ min) |
Air+ Water (Min≥24 L/ min) |
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Water connector |
water pipe with an outer diameter of 12mm |
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Ambient Temp. |
+ 5 ℃ - + 40 ℃ |
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Operating humidity |
5 % - 70 % |
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Dimensions (D* W* Hmm) |
423 * 483 * 132 |
546 * 483 * 176 |
835 * 483 * 176 |
1010 * 483 * 354 |
Order Guide
|
Model NO. |
Frequency |
Power |
|
DX-RFS-13030 |
13.56 MHz |
3 kW |
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DX-RFS-13060 |
6 kW |
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DX-RFS-13120 |
12 kW |
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DX-RFS-13200 |
20 kW |
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DX-RFS-27030 |
27.12MHz |
3 kW |
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DX-RFS-27060 |
6 kW |
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DX-RFS-27120 |
12 kW |
