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RF Power Generator+Matching Box 2 in 1 Combo Unit
Product Overview
The DX-RFM-13/27/40XXX series combo unit integrates RF Power Generator and Matching Box into one case with a compact structure, small size, and easy installation. With a stable and reliable signal source and power amplifier control module, the incident and reflected power can be accurately measured, and the output power can be precisely controlled. It is widely used in applications such as vacuum plasma generators and thin film deposition.
Product Features
- RF Power Generator+Matching Box in one case, compact structure, easy ship and install
- Full digital process, matching with high precision and in short time
- Large output power margin, capable of long-term stable operation
- Precise measurement for output power, reflected power and load impedance
- Support automatic gain control (AGC), output power accurate control
- Supports local control, IO control and remote control with RS485 and RJ45 ports
- Support continuously adjust output power from the minimum to the maximum rate with advanced power amplifier technology
- Support arc and standing wave protection, quick respond to protect equipment safety in case of abnormalities
- Support overload, overcurrent and overheat protection
Tech Parameters
|
Item |
Tech Parameters |
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|
300 W |
600 W |
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|
Mains |
Single Phase 220 V AC ±10 %, 50Hz/60Hz |
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|
RF Output |
Output Freq |
13.56MHz/27.12MHz/40.68MHz for option |
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|
Output Power Range |
5W-300W |
10W-600W |
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|
Rated Power |
300W |
600W |
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|
Max Reflected Power |
60 W |
120 W |
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|
Efficiency |
≥60 % (Z= 50 Ω, Rated Output) |
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|
Harmonic |
＜- 50dBc |
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|
Spurious |
＜- 50dBc |
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|
Power Stability |
1.0% of set point or 0.1% of full rated power, whichever is greater |
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|
Protection |
DC source over voltage |
-- |
Auto shutdown when DC voltage exceed limit |
|
|
DC source over current |
-- |
Auto shutdown when DC current exceed limit |
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|
DC source over heating |
-- |
Auto shutdown when DC temperature exceed limit |
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|
Amplifier overheating |
Auto shutdown when Amplifier overheating |
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|
Reflected power exceeds limit |
Limit output power when the reflected power exceeds the set threshold |
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|
External Lock |
auto shut down when external lock fails |
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Arc Protection |
auto shut down when arc detected |
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Cooling medium |
Air |
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Dimension |
DxWxH (mm) |
435*483*132 |
500*483*132 |
|
|
Matching performance |
Reflected power |
＜1% |
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|
Matching method |
manual/ automatic |
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|
Matching time |
＜2s |
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Order Guide (Combo model)
|
Model NO. |
Frequency |
Power |
|
DX-RFM-13003 |
13.56 MHz |
300W |
|
DX-RFM-13006 |
600W |
|
|
DX-RFM-27003 |
27.12MHz |
300W |
|
DX-RFM-27006 |
600W |
|
|
DX-RFM-40003 |
40.68MHz |
300W |
|
DX-RFM-40006 |
600W |
